Newport

Massflow 0-10 SLM ±1% Accuracy Linear Output Low Cost Thermal Technology For Flow Rates up to 75 SLM Power Supply Included Comes standard with 5-point NIST cert Accuracy: ±1% of full scale including linearity Repeatability: ±0.15% full scale or better Turndown Ratio: 100:1 Response Time: 5 seconds Gas Ambient Temperature: 0 to 50°C (32 to 122°F) Temperature Coefficient: 0.05% full scale per 1°C or better Pressure Coefficient: 0.01% full scale per psi or better Minimum Pressure Requirements: Meters: 1 inch of H2O Controllers ≤1 SLM: 1 psi Controllers &gt,20 SLM: 20 psi Differential Pressure for Mass Flow Controllers:5 LPM: 20 to 40 psi standard Maximum Gas Pressure: Polyacetal: 250 psig 316 SS: 500 psig Leak Integrity: 1 x10-6 cc/min of He or better Wetted Parts: Standard: Polyacetal, FKM O-rings Optional: 316 SS, FKM O-rings Connections: 1/4 FNPT standard, 1/4 compression fitting for all stainless steel models Input/Output Connection: 9-pin sub-D connector Control Signal: 0 to 5 Vdc Control Valve: Electromagnetic normally closed Output signal: Linear 0 to 5 Vdc, 1000 Ω min load, 4 to 20 mA, 500 Ω loop resistance Input Power: Meters: 24 Vdc @ 150 mA, 115 Vac, 220 Vac with AC adaptor Controller: 24 Vdc @ 300 mA, 115 Vac, 220 Vac with AC adaptor Weight: 1.25 kg (2.75 lb) with power supply

Polyacetal Mass Flowmeter With Display 0 to 15 SLM ±1% Accuracy Linear Output Low Cost Thermal Technology For Flow Rates up to 75 SLM Power Supply Included Comes standard with 5-point NIST cert Accuracy: ±1% of full scale including linearity Repeatability: ±0.15% full scale or better Turndown Ratio: 100:1 Response Time: 5 seconds Gas Ambient Temperature: 0 to 50°C (32 to 122°F) Temperature Coefficient: 0.05% full scale per 1°C or better Pressure Coefficient: 0.01% full scale per psi or better Minimum Pressure Requirements: Meters: 1 inch of H2O Controllers ≤1 SLM: 1 psi Controllers &gt,20 SLM: 20 psi Differential Pressure for Mass Flow Controllers:5 LPM: 20 to 40 psi standard Maximum Gas Pressure: Polyacetal: 250 psig 316 SS: 500 psig Leak Integrity: 1 x10-6 cc/min of He or better Wetted Parts: Standard: Polyacetal, FKM O-rings Optional: 316 SS, FKM O-rings Connections: 1/4 FNPT standard, 1/4 compression fitting for all stainless steel models Input/Output Connection: 9-pin sub-D connector Control Signal: 0 to 5 Vdc Control Valve: Electromagnetic normally closed Output signal: Linear 0 to 5 Vdc, 1000 Ω min load, 4 to 20 mA, 500 Ω loop resistance Input Power: Meters: 24 Vdc @ 150 mA, 115 Vac, 220 Vac with AC adaptor Controller: 24 Vdc @ 300 mA, 115 Vac, 220 Vac with AC adaptor Weight: 1.25 kg (2.75 lb) with power supply

The FMA1800A Series eletronic gas mass flowmeters provide for monitoring the flow of a wide variety of gases from 10 SCCM up to 1000 SLM. Utilizing heat transfer through a heated tube to measure molecular gas flow rate, the FMA1700A/1800A provides measurement of direct gas mass flow rate, without the need to compensate for variations in gas temperature or pressure (within stated limits). 0 to 50 SLM range Reads Gas Mass Flow Without Temperature or Pressure Compensation Available in Economical Aluminum or Corrosion- Resistant 316 SS Tiltable LCD Display for Easy Reading NIST Traceable Calibration Included Accuracy: ±1% of full scale, including linearity over 15 to 25°C and 5 to 60 psia (0.35 to 4.2 kg/cm²)(For sizes up to 100SLM), ±1.5% of full scale, including linearity over 15 to 25°C and 5 to 60 psia (0.35 to 4.2 kg/cm²)For larger sizes) Turn-Down Ratio: 100:1 Repeatability: ±0.5% of full scale and for units ≥100 scm from 0 to 20% of range Temperature Coefficient: 0.15% of full scale per °C or better Pressure Coefficient: 0.01% of full scale per psi (0.07 bar) Response Time: 800 msec time constant, 2 seconds (typical) to within ±2% of set flow rate over 25 to 100% of full scale Power Requirements:12 to 26 Vdc power @200 mA maximum Maximum Gas Pressure: 1000 psig (70 kg/cm² gauge) for ranges upto 100 SLM, 500 psig (35 kg/cm² gauge)Above 100 SLM, 20 psig optimum Gas and Ambient Temperature: 0 to 50°C (0 to 122°F) Leak Integrity: 1 x 10-9, std cc/sec of helium maximum to outside environment Materials in Fluid Contact: Aluminum models: Anodized aluminum, 316 SS, brass and FKM O-rings Stainless Steel models: 316 SS and FKM O-rings Output Signal Linear 0 to 5 Vdc: 1000 Ω minimum load 4 to 20 mA: 50 to 250 Ω loop resistance Transducer Power: 12 Vdc @ 200 mA maximum (FMA178PW) Shipping Weight: 1.1 kg (2.5 lb) Compliance: EN55011 class 1, class B, EN50082-1

Max Flow 100 cc/min 1/4 Compression Fitting Multi-Drop Capability of Up to 256 Units (for RS-485 Option) Stores Calibration Data for Up to 10 Different Gases Supports 10 Different Engineering Units Including User Defined Programmable 12 Digits Totalizer Indicates Total Gas Volume Flow Alarm Limits for High and Low Gas Flow with Relay Output Pressure Alarm (FMA6700) Limits for High and Low Gas Pressure with Relay Output Temperature Alarm (FMA6700) Limits for High and Low Gas Temperature with Relay Output Digital (RS-232 or RS-485) and Analog Outputs Operate Simultaneously Internal Conversion Factors for Up to 32 Gases Accuracy: FMA6700: ±1% of FS including linearity [0 to 50°C and 0.35 to 6.8 bar (5 to 100 psia)] Pressure Range: 0 to 6.8 bar (100 psig) (measurement) Pressure Accuracy: ±1% of FS Temperature Range: 0 to 50°C (measurement) Temperature Accuracy: ±1°C Repeatability: ±0.15% of full scale Response Time: Units up to 10 LPM @1.0 second, units greater than 10 LPM @2 seconds to within ±2% of setpoint over 25% to 100% of full scale Temp. Coefficient: 0.15% of full scale/°C or better Pressure Coefficient: 0.01% of full scale/psi (0.07 bar) or better Max Gas Pressure: 6.8 bar (100 psig) Max Burst Pressure: 13.6 bar (200 psig) Max Pressure Drop: 8 psi (at 100 L/min flow) Gas & Ambient Temp: 5 to 50°C (41 to 122°F) Output Signals: Linear 0 to 5 Vdc (3000 Ω min load impedance), 0 to 10 Vdc (6000 Ω min impedance), 4 to 20 mA optional (500 . max loop resistance). Maximum noise 20 mV peak to peak. Input Power: Is available to run at three different voltages: ±15Vdc (±200 mA maximum) or 12Vdc (300 mA maximum) standard, 24Vdc (250 mA maximum) optional (-24VDC), Circuit boards have built-in polarity reversal protection. Resettable fuses provide power input protection. Materials in Fluid Contact: 316 stainless steel, FKM O-rings. EPDM or Perfluoroelastomer O-rings optional Connections: Models 60 to 100 LPM: Standard 3/8 compression fittings Display: 128 x 64 graphic LCD with backlight (up to 8 lines of text) Calibration: Standard one 10 points NIST calibration. Optional up to 9 additional calibrations may be ordered for an additional charge per gas. CE Compliance: EN 55011 class 1, class B, EN50082-1 Environmental (per IEC 664): Installation Level II, Pollution Degree II Approximate Shipping Weights: 1.97 kg (4.34 lb)

Pressure/Temperature Gas Flowmeter,0-100LPM Multi-Drop Capability of Up to 256 Units (for RS-485 Option) Stores Calibration Data for Up to 10 Different Gases Supports 10 Different Engineering Units Including User Defined Programmable 12 Digits Totalizer Indicates Total Gas Volume Flow Alarm Limits for High and Low Gas Flow with Relay Output Pressure Alarm (FMA6700) Limits for High and Low Gas Pressure with Relay Output Temperature Alarm (FMA6700) Limits for High and Low Gas Temperature with Relay Output Digital (RS-232 or RS-485) and Analog Outputs Operate Simultaneously Internal Conversion Factors for Up to 32 Gases Accuracy: FMA6700: ±1% of FS including linearity [0 to 50°C and 0.35 to 6.8 bar (5 to 100 psia)] Pressure Range: 0 to 6.8 bar (100 psig) (measurement) Pressure Accuracy: ±1% of FS Temperature Range: 0 to 50°C (measurement) Temperature Accuracy: ±1°C Repeatability: ±0.15% of full scale Response Time: Units up to 10 LPM @1.0 second, units greater than 10 LPM @2 seconds to within ±2% of setpoint over 25% to 100% of full scale Temp. Coefficient: 0.15% of full scale/°C or better Pressure Coefficient: 0.01% of full scale/psi (0.07 bar) or better Max Gas Pressure: 6.8 bar (100 psig) Max Burst Pressure: 13.6 bar (200 psig) Max Pressure Drop: 8 psi (at 100 L/min flow) Gas & Ambient Temp: 5 to 50°C (41 to 122°F) Output Signals: Linear 0 to 5 Vdc (3000 Ω min load impedance), 0 to 10 Vdc (6000 Ω min impedance), 4 to 20 mA optional (500 . max loop resistance). Maximum noise 20 mV peak to peak. Input Power: Is available to run at three different voltages: ±15Vdc (±200 mA maximum) or 12Vdc (300 mA maximum) standard, 24Vdc (250 mA maximum) optional (-24VDC), Circuit boards have built-in polarity reversal protection. Resettable fuses provide power input protection. Materials in Fluid Contact: 316 stainless steel, FKM O-rings. EPDM or Perfluoroelastomer O-rings optional Connections: Models 60 to 100 LPM: Standard 3/8 compression fittings Display: 128 x 64 graphic LCD with backlight (up to 8 lines of text) Calibration: Standard one 10 points NIST calibration. Optional up to 9 additional calibrations may be ordered for an additional charge per gas. CE Compliance: EN 55011 class 1, class B, EN50082-1 Environmental (per IEC 664): Installation Level II, Pollution Degree II Approximate Shipping Weights: 1.97 kg (4.34 lb)